Invention Grant
US09096421B2 Stacked assembly of a MEMS integrated device having a reduced thickness
有权
具有减小厚度的MEMS集成器件的堆叠组件
- Patent Title: Stacked assembly of a MEMS integrated device having a reduced thickness
- Patent Title (中): 具有减小厚度的MEMS集成器件的堆叠组件
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Application No.: US13922577Application Date: 2013-06-20
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Publication No.: US09096421B2Publication Date: 2015-08-04
- Inventor: Federico Giovanni Ziglioli
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2012A0623 20120713
- Main IPC: H01L23/02
- IPC: H01L23/02 ; B81B7/00 ; B81C1/00

Abstract:
An assembly of a MEMS integrated device envisages: a package having a base substrate with a main surface in a horizontal plane, and a coating set on the base substrate; a first body including semiconductor material and integrating a micromechanical structure, housed within the package on the base substrate; at least one second body including semiconductor material and integrating at least one electronic component, designed to be functionally coupled to the micromechanical structure, the first body and the second body being arranged within the package stacked in a vertical direction transverse to the horizontal plane. In particular, at least one between the first body and the base substrate defines a first recess, in which the second body is housed, at least in part.
Public/Granted literature
- US20140231979A1 STACKED ASSEMBLY OF A MEMS INTEGRATED DEVICE HAVING A REDUCED THICKNESS Public/Granted day:2014-08-21
Information query
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