Invention Grant
US09090458B2 Ultrasonic transducer and method of manufacturing the same 有权
超声波换能器及其制造方法

Ultrasonic transducer and method of manufacturing the same
Abstract:
An ultrasonic transducer and a method of manufacturing the same are disclosed. The ultrasonic transducer includes a conductive substrate, a projection which is disposed on the conductive substrate and which forms a cavity therein, a via hole which penetrates the projection and conductive substrate, a first electrode which includes a metal and which fills the via hole, a second electrode which is provided on a bottom of the conductive substrate, a membrane which is provided on the projection and which covers the cavity, and an upper electrode which is provided on the membrane and which contacts the first electrode.
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