发明授权
- 专利标题: Nonvolatile semiconductor memory device and method for manufacturing same
- 专利标题(中): 非易失性半导体存储器件及其制造方法
-
申请号: US14149700申请日: 2014-01-07
-
公开(公告)号: US09070746B2公开(公告)日: 2015-06-30
- 发明人: Nobuhito Kuge
- 申请人: KABUSHIKI KAISHA TOSHIBA
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 代理机构: Holtz, Holtz, Goodman & Chick PC
- 优先权: JP2013-156523 20130729
- 主分类号: H01L21/764
- IPC分类号: H01L21/764 ; H01L21/762 ; H01L27/115 ; H01L29/06 ; H01L29/49
摘要:
According to one embodiment, a nonvolatile semiconductor memory device includes: a plurality of first semiconductor regions arranged each via a space in a direction crossing a first direction; a plurality of control gate electrodes; and a select gate electrode extending in a second direction, and the select gate electrode aligned with a control gate electrode located on an outermost side out of the plurality of control gate electrodes via the space; a first insulating layer covering the plurality of control gate electrodes and the select gate electrode, the first insulating layer provided on a side wall of the select gate electrode via the space, and a portion of the first insulating layer bridged between adjacent ones of the plurality of control gate electrodes protruding toward the space between adjacent ones of the plurality of control gate electrodes.
公开/授权文献
信息查询
IPC分类: