发明授权
- 专利标题: Semiconductor device and die bonding structure thereof
- 专利标题(中): 半导体器件及其芯片接合结构
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申请号: US14515700申请日: 2014-10-16
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公开(公告)号: US09070561B2公开(公告)日: 2015-06-30
- 发明人: Kyu Hyo Hwang , Jong Hong Lee , Gab Soo Choi , Cha Soo Jeon , Jin Sang Park , Sang Bo Bae , Yong Min Park , Sung Jin An
- 申请人: KEC Corporation
- 申请人地址: KR Seoul
- 专利权人: KEC Corporation
- 当前专利权人: KEC Corporation
- 当前专利权人地址: KR Seoul
- 优先权: KR10-2013-0133760 20131105
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L23/495
摘要:
Provided are a semiconductor device and a bonding structure thereof, in which an inter-metal compound is not formed with a semiconductor die or a lead frame, thereby improving electrical and mechanical properties and wettability and suppressing conglomeration of a die bonding material. The semiconductor device includes a semiconductor die, a barrier layer formed on a surface of the semiconductor die, a first metal layer formed on the barrier layer, a central metal layer formed on the first metal layer, and a second metal layer formed on the central metal layer. Here, the first and second metal layers have a first melting temperature, and the central metal layer has a second melting temperature lower than the first melting temperature.
公开/授权文献
- US20150123253A1 SEMICONDUCTOR DEVICE AND DIE BONDING STRUCTURE THEREOF 公开/授权日:2015-05-07
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