Invention Grant
US09046576B2 Identifying defective components on a wafer using component triangulation
有权
使用组件三角测量在晶圆上识别缺陷组件
- Patent Title: Identifying defective components on a wafer using component triangulation
- Patent Title (中): 使用组件三角测量在晶圆上识别缺陷组件
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Application No.: US13944430Application Date: 2013-07-17
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Publication No.: US09046576B2Publication Date: 2015-06-02
- Inventor: Arya Reza Behzad , Ahmadreza Rofougaran , Sam Ziqun Zhao , Jesus Alfonso Castaneda , Michael Boers
- Applicant: Broadcom Corporation
- Applicant Address: US CA Irvine
- Assignee: Broadcom Corporation
- Current Assignee: Broadcom Corporation
- Current Assignee Address: US CA Irvine
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R31/319 ; G01R31/302 ; G01R31/311 ; H01L23/544 ; G01R31/28

Abstract:
Methods and apparatus are disclosed to simultaneously, wirelessly test semiconductor components formed on a semiconductor wafer. The semiconductor components transmit respective outcomes of a self-contained testing operation to wireless automatic test equipment via a common communication channel. Multiple receiving antennas observe the outcomes from multiple directions in three dimensional space. The wireless automatic test equipment determines whether one or more of the semiconductor components operate as expected and, optionally, may use properties of the three dimensional space to determine a location of one or more of the semiconductor components. The wireless testing equipment may additionally determine performance of the semiconductor components by detecting infrared energy emitted, transmitted, and/or reflected by the semiconductor wafer before, during, and/or after a self-contained testing operation.
Public/Granted literature
- US20130311127A1 Identifying Defective Components on a Wafer Using Component Triangulation Public/Granted day:2013-11-21
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