Invention Grant
- Patent Title: Magnetic tunnel junction device and fabrication
- Patent Title (中): 磁隧道连接装置及制造
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Application No.: US14246165Application Date: 2014-04-07
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Publication No.: US09041131B2Publication Date: 2015-05-26
- Inventor: Xia Li , Seung Hyuk Kang
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Agent Sam Talpalatsky; Nicholas J. Pauley; Joseph Agusta
- Main IPC: H01L43/08
- IPC: H01L43/08 ; H01L43/02 ; G11C11/16 ; H01L43/12

Abstract:
A method of forming a magnetic tunnel junction (MTJ) device includes forming a first MTJ cap layer on a MTJ structure. The first MTJ cap layer includes a first non-nitrified metal. The method also includes forming a second MTJ cap layer over the first MTJ cap layer. The second MTJ cap layer includes a second non-nitrified metal. The method further includes forming a top electrode layer over the second MTJ cap layer. The second MTJ cap layer is conductive and configured to reduce or prevent oxidation.
Public/Granted literature
- US20140217532A1 MAGNETIC TUNNEL JUNCTION DEVICE AND FABRICATION Public/Granted day:2014-08-07
Information query
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