发明授权
US09031687B2 Method for predicting worked shape, method for determining working conditions, working method, working system, semiconductor device manufacturing method, computer program and computer program storage medium
有权
工作形状的预测方法,工作条件的确定方法,工作方法,工作系统,半导体器件的制造方法,计算机程序和计算机程序存储介质
- 专利标题: Method for predicting worked shape, method for determining working conditions, working method, working system, semiconductor device manufacturing method, computer program and computer program storage medium
- 专利标题(中): 工作形状的预测方法,工作条件的确定方法,工作方法,工作系统,半导体器件的制造方法,计算机程序和计算机程序存储介质
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申请号: US12749306申请日: 2010-03-29
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公开(公告)号: US09031687B2公开(公告)日: 2015-05-12
- 发明人: Tatsuya Senga , Akira Ishikawa , Takehiko Ueda
- 申请人: Tatsuya Senga , Akira Ishikawa , Takehiko Ueda
- 申请人地址: JP Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Morgan, Lewis & Bockius LLP
- 优先权: JP2001-024882 20010131; JP2001-268610 20010905
- 主分类号: H01L21/66
- IPC分类号: H01L21/66 ; B24B49/04 ; B24B37/04 ; B24B49/00 ; H01L21/321
摘要:
The relationship between polishing conditions constituting elements and the worked shape (amount of polishing) obtained by means of these polishing conditions is input beforehand into polishing condition determining means along with the type of the object of polishing, and polishing conditions (invariable polishing conditions) that are used in common for the polishing of this object of polishing. The polishing condition determining means determine the polishing conditions on the basis of these conditions. Specifically, the above-mentioned polishing conditions constituting elements are given in a time series, or combinations of the above-mentioned polishing conditions constituting elements are converted into variations in the swinging velocity of the polishing body, and the swinging velocity corresponding to the swinging position is determined. The polishing apparatus control means input the polishing conditions determined by the polishing condition determining means, and control the polishing apparatus so that these polishing conditions are realized. As a result, working conditions for obtaining a specified worked shape in a working apparatus can be simply and accurately determined.
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