发明授权
- 专利标题: Microelectronic packages with nanoparticle joining
- 专利标题(中): 具有纳米粒子接合的微电子封装
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申请号: US14058955申请日: 2013-10-21
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公开(公告)号: US09030001B2公开(公告)日: 2015-05-12
- 发明人: Belgacem Haba
- 申请人: Tessera, Inc.
- 申请人地址: US CA San Jose
- 专利权人: Tessera, Inc.
- 当前专利权人: Tessera, Inc.
- 当前专利权人地址: US CA San Jose
- 代理机构: Lerner, David, Littenberg, Krumholz & Mentlik, LLP
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L23/52 ; H01L21/48 ; H01L23/498 ; H01L23/00 ; H01L25/065 ; H01L25/10 ; H01L25/00 ; H01L21/50 ; B82Y40/00
摘要:
A method of making an assembly includes the steps of applying metallic nanoparticles to exposed surfaces of conductive elements of either of or both of a first component and a second component, juxtaposing the conductive elements of the first component with the conductive elements of the second component with the metallic nanoparticles disposed therebetween, and elevating a temperature at least at interfaces of the juxtaposed conductive elements to a joining temperature at which the metallic nanoparticles cause metallurgical joints to form between the juxtaposed conductive elements. The conductive elements of either of or both of the first component and the second component can include substantially rigid posts having top surfaces projecting a height above the surface of the respective component and edge surfaces extending at substantial angles away from the top surfaces thereof.
公开/授权文献
- US20140077351A1 MICROELECTRONIC PACKAGES WITH NANOPARTICLE JOINING 公开/授权日:2014-03-20
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