Invention Grant
- Patent Title: Fabricating a small-scale radiation detector
- Patent Title (中): 制造小型辐射探测器
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Application No.: US13886646Application Date: 2013-05-03
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Publication No.: US08987031B2Publication Date: 2015-03-24
- Inventor: Michael S. Gordon , Christopher V. Jahnes , Eric A. Joseph , Hiroyuki Miyazoe , Kenneth P. Rodbell , Arun Sharma , Sri M. Sri-Jayantha
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Louis J. Percello
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/18 ; G01T1/04
Abstract:
A method for a constructing radiation detector includes fabricating a multi-layer structure upon a wafer, the multi-layer structure comprising a plurality of metal layers, a plurality of sacrificial layers, and a plurality of insulating layers, forming a cavity within the multi-layer structure, filling the cavity with a gas that ionizes in response to nuclear radiation, and sealing the gas within the cavity.
Public/Granted literature
- US20140329351A1 FABRICATING A SMALL-SCALE RADIATION DETECTOR Public/Granted day:2014-11-06
Information query
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