发明授权
- 专利标题: Position measuring device
- 专利标题(中): 位置测量装置
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申请号: US13817781申请日: 2011-08-19
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公开(公告)号: US08982361B2公开(公告)日: 2015-03-17
- 发明人: Jean-Jacques Wagner
- 申请人: Jean-Jacques Wagner
- 申请人地址: CH
- 专利权人: Elesta Relays GmbH
- 当前专利权人: Elesta Relays GmbH
- 当前专利权人地址: CH
- 代理机构: Morriss O'Bryant Compagni, PC
- 优先权: CH1341/10 20100819; CH1342/10 20100819; CH1343/10 20100820
- 国际申请: PCT/CH2011/000187 WO 20110819
- 国际公布: WO2012/022002 WO 20120223
- 主分类号: G01B11/14
- IPC分类号: G01B11/14 ; B23Q7/06 ; G01D5/244 ; G01D5/347 ; H01L31/0203 ; H01L31/105 ; G01B11/00
摘要:
A position measuring apparatus with at least one material measure comprised of an optical structure of an arrangement of 3-D reflectors, at least one light receiver arranged at a distance from the material measure, a light source arranged at a distance from the material measure and at a distance from the light receiver, and at least one transparent substrate present between the material measure and the light receiver, wherein the light receiver is deposited directly on the transparent substrate, on the side of the substrate opposite the material measure in the form of a thin-film structure consisting of several layers arranged one above another. A supporting plate is provided with circuit-board conductors, on which the substrate is arranged, wherein the transparent substrate and the supporting plate are joined solidly together by a Flip-Chip assembly process.
公开/授权文献
- US20130155420A1 POSITION MEASURING DEVICE 公开/授权日:2013-06-20
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