发明授权
- 专利标题: Nonvolatile semiconductor memory device and method of manufacturing the same
- 专利标题(中): 非易失性半导体存储器件及其制造方法
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申请号: US13622644申请日: 2012-09-19
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公开(公告)号: US08981461B2公开(公告)日: 2015-03-17
- 发明人: Shosuke Fujii , Daisuke Hagishima , Kiwamu Sakuma
- 申请人: Kabushiki Kaisha Toshiba
- 申请人地址: JP Minato-ku
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Minato-ku
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 主分类号: H01L29/792
- IPC分类号: H01L29/792 ; H01L27/115 ; G11C5/02 ; G11C16/04
摘要:
According to one embodiment, a nonvolatile semiconductor memory device includes a fin-type stacked layer structure in which a first insulating layer, a first semiconductor layer, . . . an n-th insulating layer, an n-th semiconductor layer, and an (n+1)-th insulating layer (n is a natural number equal to or more than 2) are stacked in order thereof in a first direction perpendicular to a surface of a semiconductor substrate and which extends in a second direction parallel to the surface of the semiconductor substrate, first to n-th memory strings which use the first to n-th semiconductor layers as channels respectively, a common semiconductor layer which combines the first to n-th semiconductor layers at first ends of the first to n-th memory strings in the second direction.
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