发明授权
- 专利标题: Force sensor and industrial robot including the same
- 专利标题(中): 力传感器和工业机器人包括相同
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申请号: US12786828申请日: 2010-05-25
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公开(公告)号: US08965577B2公开(公告)日: 2015-02-24
- 发明人: Yasumichi Arimitsu
- 申请人: Yasumichi Arimitsu
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon USA, Inc., IP Division
- 优先权: JP2009-134187 20090603
- 主分类号: G01L1/00
- IPC分类号: G01L1/00 ; G01L5/16 ; G01B11/16 ; G01B9/02
摘要:
A force sensor includes a base unit, an elastic supporting unit, an action unit supported by the elastic supporting unit, and a detection unit that detects at least one of an external force acting on the action unit and a moment acting on the action unit. The detection unit includes a light source, a diffraction grating, a photodetector array that receives an interference image formed by light that has been emitted from the light source and diffracted by the diffraction grating and outputs signals having different phases, and a calculation unit that calculates a displacement of the action unit with respect to the base unit on the basis of the signals and calculates at least one of the external force and the moment acting on the action unit on the basis of the displacement.
公开/授权文献
- US20100312394A1 FORCE SENSOR AND INDUSTRIAL ROBOT INCLUDING THE SAME 公开/授权日:2010-12-09
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