发明授权
- 专利标题: Transistor arrangement and a method of forming a transistor arrangement
- 专利标题(中): 晶体管布置和形成晶体管布置的方法
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申请号: US13388294申请日: 2010-07-30
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公开(公告)号: US08963118B2公开(公告)日: 2015-02-24
- 发明人: Roy Somenath , Zhiqiang Gao
- 申请人: Roy Somenath , Zhiqiang Gao
- 申请人地址: SG Singapore
- 专利权人: Agency for Science, Technology and Research
- 当前专利权人: Agency for Science, Technology and Research
- 当前专利权人地址: SG Singapore
- 代理机构: Blakely, Sokoloff, Taylor & Zafman LLP
- 优先权: SG200905151-7 20090731
- 国际申请: PCT/SG2010/000287 WO 20100730
- 国际公布: WO2011/014129 WO 20110203
- 主分类号: H01L29/22
- IPC分类号: H01L29/22 ; H01L29/66 ; B82Y10/00 ; H01L29/06 ; H01L29/775 ; H01L29/786
摘要:
In an embodiment, a transistor arrangement is provided. The transistor arrangement comprises a nanowire including a first nanowire region and a second nanowire region; a first gate contact disposed over the first nanowire region; an insulating region disposed over the second nanowire region; a second gate contact disposed over the insulating region; wherein the first nanowire region and the first gate contact forms a part of an enhancement mode transistor and the second nanowire region, the insulating region and the second gate contact forms a part of a depletion mode transistor. A method of forming a transistor arrangement may also be provided. Also contemplated is a transistor and a method for forming said transistor, where the transistor comprises a nanowire and a gate contact, where the gate contact is formed by directly writing the gate contact onto a region of the nanowire.
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