发明授权
- 专利标题： Continuous generation of extreme ultraviolet light
- 专利标题（中）： 持续产生极紫外光
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申请号： US14309393申请日： 2014-06-19
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公开(公告)号： US08963110B2公开(公告)日： 2015-02-24
- 发明人: Layton Hale , Francis Chilese , Qiang Q. Zhang
- 申请人： KLA-Tencor Corporation
- 申请人地址： US CA Milpitas
- 专利权人： KLA-Tencor Corporation
- 当前专利权人： KLA-Tencor Corporation
- 当前专利权人地址： US CA Milpitas
- 代理机构： Suiter Swantz pc llo
- 主分类号： H01J35/20
- IPC分类号： H01J35/20 ; H05G2/00 ; G01N21/95 ; G03F7/20
摘要：
The generation of EUV light includes rotating a cylinder at least partially coated with a plasma-forming target material, directing pulsed illumination to a first set of helically-arranged spots traversing a material-coated portion of the rotating cylinder in a first direction and directing pulsed illumination to a second set of helically-arranged spots traversing the material-coated portion of the rotating cylinder in a second direction, the pulsed illumination being suitable for exciting the plasma-forming target material.
公开/授权文献
- US20140374611A1 Continuous Generation of Extreme Ultraviolet Light 公开/授权日：2014-12-25
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