发明授权
- 专利标题: Method of detecting condensing spot position in laser beam processing apparatus
- 专利标题(中): 检测激光束处理装置中聚光点位置的方法
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申请号: US13617046申请日: 2012-09-14
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公开(公告)号: US08957347B2公开(公告)日: 2015-02-17
- 发明人: Toshiyuki Yoshikawa , Hironari Ohkubo , Noboru Takeda
- 申请人: Toshiyuki Yoshikawa , Hironari Ohkubo , Noboru Takeda
- 申请人地址: JP Tokyo
- 专利权人: Disco Corporation
- 当前专利权人: Disco Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Greer Burns & Crain Ltd.
- 优先权: JP2011-220368 20111004
- 主分类号: H01L21/30
- IPC分类号: H01L21/30 ; H01L21/304 ; B23K26/00 ; B23K26/04 ; B23K26/40
摘要:
A method of detecting a condensing spot position in a laser beam processing apparatus, including: a detection position setting step of setting a plurality of Z-axis directional positions in a range from a starting point to an ending point of detection positions into which the condenser is positioned; a laser beam processed groove forming step of sequentially positioning the condenser into the detection positions in the range from the starting point to the ending point, performing a predetermined interval indexing feeding by operating indexing feeding means each time the detection position for the condenser is changed, and forming a laser beam processed groove of a predetermined length in the plate-shaped body at each of the detection positions for the condenser; and a laser beam processed groove imaging step of imaging the laser beam processed grooves formed in the plate-shaped body by imaging means.
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