Invention Grant
US08950269B2 Detecting anomalous stiff pillar bumps formed above a metallization system
有权
检测金属化系统上方形成的异常刚性柱状凸块
- Patent Title: Detecting anomalous stiff pillar bumps formed above a metallization system
- Patent Title (中): 检测金属化系统上方形成的异常刚性柱状凸块
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Application No.: US13560120Application Date: 2012-07-27
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Publication No.: US08950269B2Publication Date: 2015-02-10
- Inventor: Vivian W. Ryan , Holm Geisler , Dirk Breuer
- Applicant: Vivian W. Ryan , Holm Geisler , Dirk Breuer
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: G01N3/08
- IPC: G01N3/08

Abstract:
Generally, the subject matter disclosed herein relates to testing pillar bumps formed on a semiconductor chip so as to detect the presence of anomalous stiff pillar bumps. One illustrative method disclosed herein includes positioning a test probe adjacent to a side of a pillar bump formed above a metallization system of a semiconductor chip, and performing a lateral force test on the pillar bump by contacting the side of the pillar bump with the test probe while moving the test probe at a substantially constant speed that is less than approximately 1 μm/sec.
Public/Granted literature
- US20140026675A1 DETECTING ANOMALOUS STIFF PILLAR BUMPS FORMED ABOVE A METALLIZATION SYSTEM Public/Granted day:2014-01-30
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