Invention Grant
US08950269B2 Detecting anomalous stiff pillar bumps formed above a metallization system 有权
检测金属化系统上方形成的异常刚性柱状凸块

Detecting anomalous stiff pillar bumps formed above a metallization system
Abstract:
Generally, the subject matter disclosed herein relates to testing pillar bumps formed on a semiconductor chip so as to detect the presence of anomalous stiff pillar bumps. One illustrative method disclosed herein includes positioning a test probe adjacent to a side of a pillar bump formed above a metallization system of a semiconductor chip, and performing a lateral force test on the pillar bump by contacting the side of the pillar bump with the test probe while moving the test probe at a substantially constant speed that is less than approximately 1 μm/sec.
Information query
Patent Agency Ranking
0/0