发明授权
- 专利标题： Susceptor heater and method of heating a substrate
- 专利标题（中）： 受体加热器和加热基材的方法
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申请号： US13535214申请日： 2012-06-27
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公开(公告)号： US08933375B2公开(公告)日： 2015-01-13
- 发明人: Todd Dunn , Fred Alokozai , Jerry Winkler , Michael Halpin
- 申请人： Todd Dunn , Fred Alokozai , Jerry Winkler , Michael Halpin
- 申请人地址： NL Almere
- 专利权人： ASM IP Holding B.V.
- 当前专利权人： ASM IP Holding B.V.
- 当前专利权人地址： NL Almere
- 代理机构： Snell & Wilmer LLP
- 主分类号： F27B5/14
- IPC分类号： F27B5/14 ; F26B19/00
摘要：
A wafer processing apparatus may include a susceptor having a top side and a backside, a susceptor heater having a spacing member and a heating member, a shim removably mounted between the susceptor and the susceptor heater, a cavity formed by the susceptor backside, the susceptor heater, and the shim, a fluid inlet communicating with the cavity, and a plurality of fluid outlets communicating with the cavity.
公开/授权文献
- US20140000843A1 SUSCEPTOR HEATER AND METHOD OF HEATING A SUBSTRATE 公开/授权日：2014-01-02
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