Invention Grant
- Patent Title: Focusing detector of an interferometry system
- Patent Title (中): 聚焦探测器的干涉测量系统
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Application No.: US13705873Application Date: 2012-12-05
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Publication No.: US08902429B1Publication Date: 2014-12-02
- Inventor: Jie-Fei Zheng , Steve Cui
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
The disclosure is directed to focusing one or more detectors of an interferometry system. An initial focus position may be determined by focusing a detector on an edge of a sample by comparing image contrast of intensity frames collected by the detector. Data associated with an inner edge of a ring formed by the image of the sample reflected on a reference flat may be collected from one or more positions near the initial focus position. The detector can be focused to a selected position by comparing edge data collected at the various detector positions near the initial focus position.
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