发明授权
- 专利标题: Optical imaging device with thermal attenuation
- 专利标题(中): 具有热衰减的光学成像装置
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申请号: US13712576申请日: 2012-12-12
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公开(公告)号: US08902401B2公开(公告)日: 2014-12-02
- 发明人: Bernhard Gellrich , Jens Kugler , Thomas Ittner , Stefan Hembacher , Karl-Heinz Schimitzek , Payam Tayebati , Hubert Holderer
- 申请人: Carl Zeiss SMT GmbH
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 优先权: DE102006021797 20060509
- 主分类号: G03B27/52
- IPC分类号: G03B27/52 ; G03F7/20
摘要:
An optical imaging device, in particular for use in microlithography, includes a mask device for receiving a mask having a projection pattern, a projection device with an optical element group, a substrate device for receiving a substrate and an immersion zone. The optical element group is adapted to project the projection pattern onto the substrate and includes a plurality of optical elements with an immersion element to which the substrate is at least temporarily located adjacent to during operation. During operation, the immersion zone is located between the immersion element and the substrate and is at least temporarily filled with an immersion medium. A thermal attenuation device is provided, the thermal attenuation device being adapted to reduce fluctuations within the temperature distribution of the immersion element induced by the immersion medium.
公开/授权文献
- US20130114057A1 OPTICAL IMAGING DEVICE WITH THERMAL ATTENUATION 公开/授权日:2013-05-09
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