发明授权
- 专利标题: Dose measurement device for plasma-immersion ion implantation
- 专利标题(中): 用于等离子体浸没离子注入的剂量测量装置
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申请号: US13701291申请日: 2011-06-01
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公开(公告)号: US08895945B2公开(公告)日: 2014-11-25
- 发明人: Frank Torregrosa , Laurent Roux
- 申请人: Frank Torregrosa , Laurent Roux
- 申请人地址: FR Peynier
- 专利权人: Ion Beam Services
- 当前专利权人: Ion Beam Services
- 当前专利权人地址: FR Peynier
- 代理机构: Sughrue Mion, PLLC
- 优先权: FR1002353 20100603
- 国际申请: PCT/FR2011/000323 WO 20110601
- 国际公布: WO2011/151540 WO 20111208
- 主分类号: G21K5/04
- IPC分类号: G21K5/04 ; H01J37/32 ; H01J37/244 ; G01T1/02
摘要:
The present invention relates to a dose-measurement device for ion implantation, the device comprising a module CUR for estimating implantation current, a secondary electron detector DSE, and a control circuit CC for estimating the ion current by taking the difference between said implantation current and the current from said secondary electron detector. Furthermore, said high-energy secondary electron detector comprises a collector COL, P supporting exactly three mutually insulated electrodes: a first repulsion electrode G1, A1, T1 for repelling charges of a predetermined sign that are to be repelled, said electrode being provided with at least one orifice for passing electrons; a second repulsion electrode G2, A2, T2 for repelling charges of the opposite sign that are to be repelled, said electrode also being provided with at least one orifice for passing electrons; and a selection electrode G3, A3, T3, this electrode also being provided with at least one orifice for passing electrons.
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