- 专利标题: Miniature MEMS actuator assemblies
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申请号: US13843107申请日: 2013-03-15
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公开(公告)号: US08891186B2公开(公告)日: 2014-11-18
- 发明人: Robert J. Calvet , Guigin Wang , Roman C. Gutierrez , Xiaolei Liu
- 申请人: DigitalOptics Corporation MEMS
- 申请人地址: US CA Arcadia
- 专利权人: DigitalOptics Corporation MEMS
- 当前专利权人: DigitalOptics Corporation MEMS
- 当前专利权人地址: US CA Arcadia
- 代理机构: Haynes and Boone, LLP
- 主分类号: G02B7/02
- IPC分类号: G02B7/02 ; G02B7/08 ; G03B13/00 ; G03B3/10 ; G03B17/00 ; H02N1/00
摘要:
In one embodiment, an electrostatic actuator includes a generally planar fixed frame, a generally planar moving frame coupled to the fixed frame by a flexure for substantially coplanar, perpendicular movement relative to the fixed frame, a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moving frame, and an elongated output shaft having opposite input and output ends, the input end being coupled to the moving frame.
公开/授权文献
- US08947797B2 Miniature MEMS actuator assemblies 公开/授权日:2015-02-03
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |