发明授权
US08877422B2 Resist underlayer film composition and patterning process using the same
有权
抗蚀剂下层膜组合物和使用其的图案化工艺
- 专利标题: Resist underlayer film composition and patterning process using the same
- 专利标题(中): 抗蚀剂下层膜组合物和使用其的图案化工艺
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申请号: US13269290申请日: 2011-10-07
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公开(公告)号: US08877422B2公开(公告)日: 2014-11-04
- 发明人: Tsutomu Ogihara , Daisuke Kori , Yusuke Biyajima , Toshihiko Fujii , Takeru Watanabe , Takeshi Kinsho
- 申请人: Tsutomu Ogihara , Daisuke Kori , Yusuke Biyajima , Toshihiko Fujii , Takeru Watanabe , Takeshi Kinsho
- 申请人地址: JP Tokyo
- 专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff PLC
- 优先权: JP2010-244981 20101101
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/26 ; G03F7/09
摘要:
There is disclosed a resist underlayer film composition, wherein the composition contains a polymer obtained by condensation of, at least, one or more compounds represented by the following general formula (1-1) and/or (1-2), and one or more kinds of compounds and/or equivalent bodies thereof represented by the following general formula (2). There can be provided an underlayer film composition, especially for a trilayer resist process, that can form an underlayer film having reduced reflectance, namely, an underlayer film having optimum n-value and k-value, excellent filling-up properties, high pattern-antibending properties, and not causing line fall or wiggling after etching especially in a high aspect line that is thinner than 60 nm, and a patterning process using the same.
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