发明授权
- 专利标题： Graphene pressure sensors
- 专利标题（中）： 石墨烯压力传感器
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申请号： US13600469申请日： 2012-08-31
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公开(公告)号： US08852985B2公开(公告)日： 2014-10-07
- 发明人: Jin Cai , Yanqing Wu , Wenjuan Zhu
- 申请人： Jin Cai , Yanqing Wu , Wenjuan Zhu
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理机构： Ryan, Mason & Lewis, LLP
- 代理商 Vazken Alexanian
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H01L29/02
摘要：
Semiconductor nano pressure sensor devices having graphene membrane suspended over open cavities formed in a semiconductor substrate. A suspended graphene membrane serves as an active electro-mechanical membrane for sensing pressure, which can be made very thin, from about one atomic layer to about 10 atomic layers in thickness, to improve the sensitivity and reliability of a semiconductor pressure sensor device.
公开/授权文献
- US20130273682A1 GRAPHENE PRESSURE SENSORS 公开/授权日：2013-10-17
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