Invention Grant
- Patent Title: Free layer with high thermal stability for magnetic device applications by insertion of a boron dusting layer
- Patent Title (中): 通过插入硼粉尘层,磁性器件应用具有高热稳定性的自由层
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Application No.: US13448557Application Date: 2012-04-17
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Publication No.: US08852760B2Publication Date: 2014-10-07
- Inventor: Yu-Jen Wang , Witold Kula , Ru-Ying Tong , Guenole Jan
- Applicant: Yu-Jen Wang , Witold Kula , Ru-Ying Tong , Guenole Jan
- Applicant Address: US CA Milpitas
- Assignee: Headway Technologies, Inc.
- Current Assignee: Headway Technologies, Inc.
- Current Assignee Address: US CA Milpitas
- Agency: Saile Ackerman LLC
- Agent Stephen B. Ackerman
- Main IPC: H01L29/82
- IPC: H01L29/82 ; G01R33/09 ; G11B5/39

Abstract:
A boron or boron containing dusting layer such as CoB or FeB is formed along one or both of top and bottom surfaces of a free layer at interfaces with a tunnel barrier layer and capping layer to improve thermal stability while maintaining other magnetic properties of a MTJ stack. Each dusting layer has a thickness from 0.2 to 20 Angstroms and may be used as deposited, or at temperatures up to 400° C. or higher, or following a subsequent anneal at 400° C. or higher. The free layer may be a single layer of CoFe, Co, CoFeB or CoFeNiB, or may include a non-magnetic insertion layer. The resulting MTJ is suitable for STT-MRAM memory elements or spintronic devices. Perpendicular magnetic anisotropy is maintained in the free layer at temperatures up to 400° C. or higher. Ku enhancement is achieved and the retention time of a memory cell for STT-MRAM designs is increased.
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