Invention Grant
- Patent Title: Method for manufacturing workpieces and apparatus
- Patent Title (中): 制造工件和设备的方法
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Application No.: US12256543Application Date: 2008-10-23
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Publication No.: US08834969B2Publication Date: 2014-09-16
- Inventor: Bernd Heinz
- Applicant: Bernd Heinz
- Applicant Address: LI Balzers
- Assignee: Oerlikon Advanced Technologies AG
- Current Assignee: Oerlikon Advanced Technologies AG
- Current Assignee Address: LI Balzers
- Agency: Pearne & Gordon LLP
- Main IPC: B05D5/12
- IPC: B05D5/12 ; B05D3/00 ; H01L21/67 ; H01L21/677 ; H01L21/687
Abstract:
For vacuum treatment of workpieces by a multitude of distinct processing stations (P11-P1n, P21-P2m) the processing stations are grouped in two groups (I and II). The workpieces are handled towards and from the processing stations of the first group (I) simultaneously, whereat the workpieces are treated by the processing stations of the second group (II) in a selectable individual sequence.
Public/Granted literature
- US20090106968A1 METHOD FOR MANUFACTURING WORKPIECES AND APPARATUS Public/Granted day:2009-04-30
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