Invention Grant
US08829775B2 Planar mirco-tube discharger structure and method for fabricating the same 有权
平面微管放电器结构及其制造方法

Planar mirco-tube discharger structure and method for fabricating the same
Abstract:
The present invention discloses a semiconductor-based planar micro-tube discharger structure and a method for fabricating the same. The method comprises steps: forming on a substrate two patterned electrodes separated by a gap and at least one separating block arranged in the gap; forming an insulating layer over the patterned electrodes and the separating block and filling the insulating layer into the gap. Thereby are formed at least two discharge paths. The method can fabricate a plurality discharge paths in a semiconductor structure. Therefore, the structure of the present invention has very high reliability and reusability.
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