Invention Grant
- Patent Title: Retarding field analyzer integral with particle beam column
- Patent Title (中): 使用粒子束柱将场分析仪整合在一起
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Application No.: US13847313Application Date: 2013-03-19
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Publication No.: US08803102B2Publication Date: 2014-08-12
- Inventor: David William Tuggle , James B. McGinn , Charles Otis
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg
- Main IPC: H01J37/12
- IPC: H01J37/12 ; H01J37/28
Abstract:
A retarding field analyzer uses the existing components of a charged particle beam system eliminating the need for inserting a separate retarding field analyzer device. Using components of the existing column reduces the time required to analyze the beam. Using the imaging capabilities of the existing column facilitates alignment of the beam with the analyzer.
Public/Granted literature
- US20140117233A1 Retarding Field Analyzer Integral with Particle Beam Column Public/Granted day:2014-05-01
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