Invention Grant
- Patent Title: Magnetic tunnel junction for MRAM applications
- Patent Title (中): 用于MRAM应用的磁隧道结
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Application No.: US12930877Application Date: 2011-01-19
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Publication No.: US08786036B2Publication Date: 2014-07-22
- Inventor: Wei Cao , Cheng T. Horng , Witold Kula , Chyu Jiuh Torng
- Applicant: Wei Cao , Cheng T. Horng , Witold Kula , Chyu Jiuh Torng
- Applicant Address: US CA Milpitas
- Assignee: Headway Technologies, Inc.
- Current Assignee: Headway Technologies, Inc.
- Current Assignee Address: US CA Milpitas
- Agency: Saile Ackerman LLC
- Agent Stephen B. Ackerman
- Main IPC: H01L43/10
- IPC: H01L43/10 ; H01L27/22

Abstract:
A MTJ in an MRAM array is disclosed with a composite free layer having a lower crystalline layer contacting a tunnel barrier and an upper amorphous NiFeX layer for improved bit switching performance. The crystalline layer is Fe, Ni, or FEB with a thickness of at least 6 Angstroms which affords a high magnetoresistive ratio. The X element in the NiFeX layer is Mg, Hf, Zr, Nb, or Ta with a content of 5 to 30 atomic % NiFeX thickness is preferably between 20 to 40 Angstroms to substantially reduce bit line switching current and number of shorted bits. In an alternative embodiments, the crystalline layer may be a Fe/NiFe bilayer. Optionally, the amorphous layer may have a NiFeM1/NiFeM2 configuration where M1 and M2 are Mg, Hf, Zr, Nb, or Ta, and M1 is unequal to M2. Annealing at 300° C. to 360° C. provides a high magnetoresistive ratio of about 150%.
Public/Granted literature
- US20120181537A1 Magnetic Tunnel Junction for MRAM applications Public/Granted day:2012-07-19
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