Invention Grant
- Patent Title: Method for manufacturing semiconductor optical modulator and semiconductor optical modulator
- Patent Title (中): 制造半导体光调制器和半导体光调制器的方法
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Application No.: US13478280Application Date: 2012-05-23
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Publication No.: US08731344B2Publication Date: 2014-05-20
- Inventor: Hideki Yagi
- Applicant: Hideki Yagi
- Applicant Address: JP Osaka
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka
- Agency: Smith, Gambrell & Russell, LLP
- Priority: JP2011-124299 20110602
- Main IPC: G02B6/12
- IPC: G02B6/12 ; G02B6/10 ; G02F1/015 ; H01L21/302 ; B29D11/00 ; B23B9/04 ; H01L21/36

Abstract:
A method for manufacturing a semiconductor optical modulator includes forming a p-type semiconductor layer on a main surface of a p-type semiconductor substrate; forming a pair of stripe-shaped masks on the p-type semiconductor layer, the stripe-shaped masks extending in a first direction along the main surface of the p-type semiconductor substrate and being spaced apart from each other; simultaneously forming a hole and a pair of stripe structures extending in the first direction by etching the p-type semiconductor layer through the stripe-shaped masks, the pair of stripe structures defining the hole; after removing the stripe-shaped masks, forming a buried layer in the hole; forming a core layer on the buried layer and the stripe structures; and forming an upper cladding layer on the core layer. The buried layer is made of a semiconductor material with a lower optical absorption loss than that of the p-type semiconductor layer.
Public/Granted literature
- US20120308173A1 METHOD FOR MANUFACTURING SEMICONDUCTOR OPTICAL MODULATOR AND SEMICONDUCTOR OPTICAL MODULATOR Public/Granted day:2012-12-06
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