发明授权
- 专利标题: Homing of arbitrary scan path of a rotating magnetron
- 专利标题(中): 回旋磁控管的任意扫描路径
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申请号: US13347030申请日: 2012-01-10
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公开(公告)号: US08721847B2公开(公告)日: 2014-05-13
- 发明人: Yu Chang , William Kuang , Ronald D. DeDore , Jitendra R. Bhimjiyani , Wesley W. Zhang
- 申请人: Yu Chang , William Kuang , Ronald D. DeDore , Jitendra R. Bhimjiyani , Wesley W. Zhang
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理商 Charles S. Guenzer
- 主分类号: C23C14/35
- IPC分类号: C23C14/35
摘要:
A control system and method for controlling two motors determining the azimuthal and circumferential position of a magnetron rotating about the central axis of the sputter chamber in back of its target sputtering and capable of a nearly arbitrary scan path, e.g., with a planetary gear mechanism. A system controller periodically sends commands to the motion controller which closely controls the motors. Each command includes a command ticket, which may be one of several values. The motion controller accepts only commands having a command ticket of a different value from the immediately preceding command. One command selects a scan profile stored in the motion controller, which calculates motor signals from the selected profile. Another command instructs a dynamic homing command which interrogates sensors of the position of two rotating arms to determine if the arms in the expected positions. If not, the arms are rehomed.
公开/授权文献
- US20120103800A1 Homing of arbitrary scan path of a rotating magnetron 公开/授权日:2012-05-03
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