Invention Grant
- Patent Title: Bipolar junction transistor with a self-aligned emitter and base
- Patent Title (中): 具有自对准发射极和基极的双极结晶体管
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Application No.: US13755192Application Date: 2013-01-31
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Publication No.: US08710500B2Publication Date: 2014-04-29
- Inventor: Kevin K. Chan , Erik M. Dahlstrom , Peter B. Gray , David L. Harame , Qizhi Liu
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Wood, Herron & Evans LLP
- Agent Anthony J. Canale
- Main IPC: H01L29/737
- IPC: H01L29/737

Abstract:
Methods for fabricating bipolar junction transistors with self-aligned emitter and extrinsic base, bipolar junction transistors made by the methods, and design structures for a BiCMOS integrated circuit. The bipolar junction transistor is fabricated using a sacrificial emitter pedestal that provides a sacrificial mandrel promoting self-alignment between the emitter and the extrinsic base. The sacrificial emitter pedestal is subsequently removed to open an emitter window extending to the intrinsic base. An emitter is formed in the emitter window that lands on the intrinsic base.
Public/Granted literature
- US20130140566A1 BIPOLAR JUNCTION TRANSISTOR WITH A SELF-ALIGNED EMITTER AND BASE Public/Granted day:2013-06-06
Information query
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