Invention Grant
US08709371B2 Method for growing group III-nitride crystals in supercritical ammonia using an autoclave
有权
使用高压釜在超临界氨中生长III族氮化物晶体的方法
- Patent Title: Method for growing group III-nitride crystals in supercritical ammonia using an autoclave
- Patent Title (中): 使用高压釜在超临界氨中生长III族氮化物晶体的方法
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Application No.: US11921396Application Date: 2005-07-08
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Publication No.: US08709371B2Publication Date: 2014-04-29
- Inventor: Kenji Fujito , Tadao Hashimoto , Shuji Nakamura
- Applicant: Kenji Fujito , Tadao Hashimoto , Shuji Nakamura
- Applicant Address: US CA Oakland JP Kawaguchi, Saitama Prefecture
- Assignee: The Regents of the University of California,Japan Science and Technology Agency
- Current Assignee: The Regents of the University of California,Japan Science and Technology Agency
- Current Assignee Address: US CA Oakland JP Kawaguchi, Saitama Prefecture
- Agency: Gates & Cooper LLP
- International Application: PCT/US2005/024239 WO 20050708
- International Announcement: WO2007/008198 WO 20070118
- Main IPC: C01B21/06
- IPC: C01B21/06 ; C30B23/00 ; C30B25/00 ; C30B28/12 ; C30B28/14

Abstract:
A method of growing high-quality, group-III nitride, bulk single crystals. The group III-nitride bulk crystal is grown in an autoclave in supercritical ammonia using a source material or nutrient that is a group III-nitride polycrystals or group-III metal having a grain size of at least 10 microns or more and a seed crystal that is a group-III nitride single crystal. The group III-nitride polycrystals may be recycled from previous ammonothermal process after annealing in reducing gas at more then 600° C. The autoclave may include an internal chamber that is filled with ammonia, wherein the ammonia is released from the internal chamber into the autoclave when the ammonia attains a supercritical state after the heating of the autoclave, such that convection of the supercritical ammonia transfers source materials and deposits the transferred source materials onto seed crystals, but undissolved particles of the source materials are prevented from being transferred and deposited on the seed crystals.
Public/Granted literature
- US20100158785A1 Method for Growing Group III-Nitride Crystals in Supercritical Ammonia Using an Autoclave Public/Granted day:2010-06-24
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