Invention Grant
- Patent Title: Charged particle beam drawing apparatus, and method of manufacturing article
- Patent Title (中): 带电粒子束拉制装置及其制造方法
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Application No.: US13550702Application Date: 2012-07-17
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Publication No.: US08686378B2Publication Date: 2014-04-01
- Inventor: Shigeru Terashima
- Applicant: Shigeru Terashima
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms McDowell LLP
- Priority: JP2011-177251 20110812
- Main IPC: H01J37/12
- IPC: H01J37/12 ; H01J7/22

Abstract:
A charged particle beam drawing apparatus includes an electrostatic lens including an electrode member and configured to project the plurality of charged particle beams onto the substrate via the electrode member. In the electrode member are formed a plurality of first openings via which the plurality of charged particle beams pass, and a plurality of second openings different from the plurality of first openings, a total area of the plurality of second openings being not smaller than a total area of the plurality of first openings.
Public/Granted literature
- US20130040240A1 CHARGED PARTICLE BEAM DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2013-02-14
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