Invention Grant
US08679920B2 Semiconductor devices having stacked structures and a layer formed thereon tapered in direction opposite of a tapering of the stacked structures and methods of fabricating the same
有权
具有堆叠结构的半导体器件和形成在其上的层与层叠结构的锥形方向相反的方向形成,并且其制造方法
- Patent Title: Semiconductor devices having stacked structures and a layer formed thereon tapered in direction opposite of a tapering of the stacked structures and methods of fabricating the same
- Patent Title (中): 具有堆叠结构的半导体器件和形成在其上的层与层叠结构的锥形方向相反的方向形成,并且其制造方法
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Application No.: US13273935Application Date: 2011-10-14
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Publication No.: US08679920B2Publication Date: 2014-03-25
- Inventor: Hauk Han , Byoung-Kyu Lee , Jingi Hong , Changwon Lee , Eungjoon Lee , Je-Hyeon Park , Jeonggil Lee
- Applicant: Hauk Han , Byoung-Kyu Lee , Jingi Hong , Changwon Lee , Eungjoon Lee , Je-Hyeon Park , Jeonggil Lee
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2010-0100465 20101014
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Semiconductor devices and methods of fabricating semiconductor devices that may include forming an insulation structure including insulation patterns that are sequentially stacked and vertically separated from each other to provide gap regions between the insulation patterns, forming a first conductive layer filling the gap regions and covering two opposite sidewalls of the insulation structure, and forming a second conductive layer covering the first conductive layer. A thickness of the second conductive layer covering an upper sidewall of the insulation structure is greater than a thickness of the second conductive layer covering a lower sidewall of the insulation structure.
Public/Granted literature
- US20120094453A1 Semiconductor Devices And Methods Of Fabricating The Same Public/Granted day:2012-04-19
Information query
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