Invention Grant
US08674393B2 Substrate structure and fabrication thereof, and light emitting diode devices fabricated from the same 有权
基板结构及其制造以及由其制造的发光二极管器件

Substrate structure and fabrication thereof, and light emitting diode devices fabricated from the same
Abstract:
A substrate structure is described, including a starting substrate, crystal piers on the starting substrate, and a mask layer. The mask layer covers an upper portion of the sidewall of each crystal pier, is connected between the crystal piers at its bottom, and is separated from the starting substrate by an empty space between the crystal piers. An epitaxial substrate structure is also described, which can be formed by growing an epitaxial layer over the above substrate structure form the crystal piers. The crystal piers may be broken after the epitaxial layer is grown.
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