Invention Grant
US08658984B2 Charged particle analysers and methods of separating charged particles
有权
带电粒子分析仪和分离带电粒子的方法
- Patent Title: Charged particle analysers and methods of separating charged particles
- Patent Title (中): 带电粒子分析仪和分离带电粒子的方法
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Application No.: US13375187Application Date: 2010-05-27
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Publication No.: US08658984B2Publication Date: 2014-02-25
- Inventor: Alexander A. Makarov , Anastassios Giannakopulos
- Applicant: Alexander A. Makarov , Anastassios Giannakopulos
- Applicant Address: DE Bremen
- Assignee: Thermo Fisher Scientific (Bremen) GmbH
- Current Assignee: Thermo Fisher Scientific (Bremen) GmbH
- Current Assignee Address: DE Bremen
- Agent Charles B. Katz
- Priority: GB0909233.9 20090529
- International Application: PCT/EP2010/057342 WO 20100527
- International Announcement: WO2010/136534 WO 20101202
- Main IPC: H01J3/16
- IPC: H01J3/16

Abstract:
A method of separating charged particles using an analyzer is provided, the method comprising: causing a beam of charged particles to fly through the analyzer and undergo within the analyzer at least one full oscillation in the direction of an analyzer axis (z) of the analyzer whilst orbiting about the axis (z) along a main flight path; constraining the arcuate divergence of the beam as it flies through the analyzer; and separating the charged particles according to their flight time. An analyzer for performing the method is also provided. At least one arcuate focusing lens is preferably used to constrain the divergence, which may comprise a pair of opposed electrodes located either side of the beam. An array of arcuate focusing lenses may be used which are located at substantially the same z coordinate, the arcuate focusing lenses in the array being spaced apart in the arcuate direction and the array extending at least partially around the z axis, thereby constraining the arcuate divergence of the beam a plurality of times as it flies through the analyzer.
Public/Granted literature
- US20120091332A1 Charged Particle Analysers and Methods of Separating Charged Particles Public/Granted day:2012-04-19
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