发明授权
- 专利标题: Recrystallization of semiconductor wafers in a thin film capsule and related processes
- 专利标题(中): 半导体晶片在薄膜胶囊中的重结晶及相关工艺
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申请号: US12665495申请日: 2008-06-26
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公开(公告)号: US08633483B2公开(公告)日: 2014-01-21
- 发明人: Emanuel M. Sachs , James G. Serdy , Eerik T. Hantsoo
- 申请人: Emanuel M. Sachs , James G. Serdy , Eerik T. Hantsoo
- 申请人地址: US MA Cambridge
- 专利权人: Massachusetts Institute of Technology
- 当前专利权人: Massachusetts Institute of Technology
- 当前专利权人地址: US MA Cambridge
- 代理商 Steven J. Weissburg
- 国际申请: PCT/US2008/008030 WO 20080626
- 国际公布: WO2009/002550 WO 20081231
- 主分类号: H01L29/04
- IPC分类号: H01L29/04
摘要:
An original wafer, typically silicon, has the form of a desired end PV wafer. The original may be made by rapid solidification or CVD. It has small grains. It is encapsulated in a clean thin film, which contains and protects the silicon when recrystallized to create a larger grain structure. The capsule can be made by heating a wafer in the presence of oxygen, or steam, resulting in silicon dioxide on the outer surface, typically 1-2 microns. Further heating creates a molten zone in space, through which the wafer travels, resulting in recrystallization with a larger grain size. The capsule contains the molten material during recrystallization, and protects against impurities. Recrystallization may be in air. Thermal transfer through backing plates minimizes stresses and defects. After recrystallization, the capsule is removed.
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