发明授权
- 专利标题: Method for depositing oxide films on textured metal pipes
- 专利标题(中): 在纹理金属管上沉积氧化膜的方法
-
申请号: US13139947申请日: 2009-12-18
-
公开(公告)号: US08633138B2公开(公告)日: 2014-01-21
- 发明人: Philippe Odier , Stéphanie Morlens , Cyril Millon , Tristan Caroff , Carmen Jimenez , Jean-Louis Soubeyroux , Arnaud Allais , Mark Rikel
- 申请人: Philippe Odier , Stéphanie Morlens , Cyril Millon , Tristan Caroff , Carmen Jimenez , Jean-Louis Soubeyroux , Arnaud Allais , Mark Rikel
- 申请人地址: FR Paris Cedex
- 专利权人: Centre National de la Recherche Scientifique
- 当前专利权人: Centre National de la Recherche Scientifique
- 当前专利权人地址: FR Paris Cedex
- 代理机构: McCarter & English, LLP
- 优先权: FR0807113 20081218
- 国际申请: PCT/FR2009/001448 WO 20091218
- 国际公布: WO2010/076428 WO 20100708
- 主分类号: H01L39/24
- IPC分类号: H01L39/24
摘要:
Method of depositing a buffer layer of epitaxial metal oxide on a functionalised surface of a textured metal substrate, said method comprising the following steps: (1) a layer is deposited of a precursor of an oxide of the type A2−xB2+xO7 where A represents a metal of valency 3 or a mixture of several of these metals, and B a metal of valency 4, and x is a number between −0.1 and +0.1, from a solution of carboxylates of said metals A and B, (2) said layer of oxide precursor is left to dry, (3) heat treatment is carried out in order to pyrolyse said oxide precursor and to form the oxide, at least part of said heat treatment being carried out under a flow of reducing gas.
公开/授权文献
信息查询
IPC分类: