发明授权
- 专利标题: Laser processing method and laser processing device
- 专利标题(中): 激光加工方法和激光加工装置
-
申请号: US13059592申请日: 2009-10-23
-
公开(公告)号: US08628715B2公开(公告)日: 2014-01-14
- 发明人: Motoki Kakui , Kazuo Nakamae , Shinobu Tamaoki
- 申请人: Motoki Kakui , Kazuo Nakamae , Shinobu Tamaoki
- 申请人地址: JP Osaka-shi
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JP Osaka-shi
- 代理机构: Venable LLP
- 代理商 Michael A. Sartori; Tamatane J. Aga
- 优先权: JP2008-273341 20081023
- 国际申请: PCT/JP2009/068240 WO 20091023
- 国际公布: WO2010/047384 WO 20100429
- 主分类号: B29C35/08
- IPC分类号: B29C35/08
摘要:
The present invention relates to a laser processing method and the like which use no wavelength conversion technique by nonlinear optical crystals when selectively removing an insulating layer of a printed board, while employing only one wavelength throughout the entire removal processing. A laser processing apparatus (1), preferably used in the laser processing method, has a MOPA structure and comprises a seed light source (100), a YbDF (110), a bandpass filter (120), a YbDF (130), a bandpass filter (140), a YbDF (150), a YbDF (160), and so forth. The laser processing method according to the present invention is a laser processing method of removing an insulating layer comprised of a resin laminated on a conductor layer by irradiating it with pulsed laser light outputted from the laser processing apparatus (1) and uses laser light having a wavelength at which the light absorbed by the conductor layer is less than 10%, and sets the fluence per one pulse to a fracture damage threshold of the insulating layer or higher.
公开/授权文献
- US20110148002A1 LASER PROCESSING METHOD AND LASER PROCESSING DEVICE 公开/授权日:2011-06-23
信息查询
IPC分类: