发明授权

Vacuum pump
摘要:
A vacuum pump having a vacuum pumping mechanism mounted for rotation by a shaft and a brushless motor for rotating the shaft where the vacuum pumping mechanism comprises a turbo pumping mechanism comprising pumping stages, and a molecular drag pumping mechanism comprising at least one pumping stage, and a shaft supported for rotation by bearings, and where the motor comprises a permanent magnet rotor fixed relative to the shaft and the rotor has four poles and a stator has non-overlapping stator coils.
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