发明授权
- 专利标题: Method for applying a diamond layer onto a graphite substrate
- 专利标题(中): 在金刚石基底上涂布金刚石层的方法
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申请号: US12338107申请日: 2008-12-18
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公开(公告)号: US08597731B2公开(公告)日: 2013-12-03
- 发明人: Matthias Fryda , Thorsten Matthee , Shane Mulcahy
- 申请人: Matthias Fryda , Thorsten Matthee , Shane Mulcahy
- 申请人地址: DE Itzehoe
- 专利权人: Condias GmbH
- 当前专利权人: Condias GmbH
- 当前专利权人地址: DE Itzehoe
- 代理机构: Whitham Curtis Christofferson & Cook, PC
- 优先权: EP07024950 20071221
- 主分类号: C23C16/44
- IPC分类号: C23C16/44
摘要:
A diamond layer can be applied stably onto a graphite substrate in a CVD process when the graphite substrate is subjected to the following pretreatment steps before the CVD process: fine cleaning of the surface in a vacuum at a temperature >500° C., preferably >800° C., in an etching gas atmosphere, mechanical removal of loose particles, seeding of the substrate surface with very small diamond particles and at least one degassing treatment in a vacuum to remove adsorbed hydrocarbons and adsorbed air at a temperature T>500° C., preferably T>700° C.
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