Invention Grant
- Patent Title: Method of determining a spring constant of a cantilever and scanning probe microscope using the method
- Patent Title (中): 使用该方法确定悬臂弹簧常数和扫描探针显微镜的方法
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Application No.: US13545197Application Date: 2012-07-10
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Publication No.: US08584261B2Publication Date: 2013-11-12
- Inventor: Masafumi Watanabe , Hiroumi Momota
- Applicant: Masafumi Watanabe , Hiroumi Momota
- Applicant Address: JP Chiba
- Assignee: SII Nanotechnology Inc.
- Current Assignee: SII Nanotechnology Inc.
- Current Assignee Address: JP Chiba
- Agency: Brinks Gilson & Lione
- Priority: JP2011-193940 20110906
- Main IPC: G01Q70/16
- IPC: G01Q70/16 ; G01Q70/08 ; G01Q60/22 ; G01Q70/10 ; G01Q60/38
Abstract:
In a cantilever which is used in a scanning probe microscope or the like and has a trapezoidal cross-sectional shape formed through anisotropic etching in a silicon process, a cantilever spring constant is determined without measuring a thickness directly. A cantilever thickness is determined based on upper base and lower base lengths of the trapezoidal cross-sectional shape and geometric regularity of a surface generated by the anisotropic etching. Then, the cantilever spring constant is determined based on the cantilever thickness, a cantilever length, and a Young's modulus.
Public/Granted literature
- US20130061357A1 METHOD OF DETERMINING A SPRING CONSTANT OF A CANTILEVER AND SCANNING PROBE MICROSCOPE USING THE METHOD Public/Granted day:2013-03-07
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