Invention Grant
US08584261B2 Method of determining a spring constant of a cantilever and scanning probe microscope using the method 有权
使用该方法确定悬臂弹簧常数和扫描探针显微镜的方法

Method of determining a spring constant of a cantilever and scanning probe microscope using the method
Abstract:
In a cantilever which is used in a scanning probe microscope or the like and has a trapezoidal cross-sectional shape formed through anisotropic etching in a silicon process, a cantilever spring constant is determined without measuring a thickness directly. A cantilever thickness is determined based on upper base and lower base lengths of the trapezoidal cross-sectional shape and geometric regularity of a surface generated by the anisotropic etching. Then, the cantilever spring constant is determined based on the cantilever thickness, a cantilever length, and a Young's modulus.
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