Invention Grant
US08562113B2 Piezoelectric thin film, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
有权
压电薄膜，喷墨头，通过喷墨头形成图像的方法，角速度传感器，角速度传感器测量角速度的方法，压电发生元件以及使用压电发生元件产生电力的方法
- Patent Title: Piezoelectric thin film, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
- Patent Title (中): 压电薄膜，喷墨头，通过喷墨头形成图像的方法，角速度传感器，角速度传感器测量角速度的方法，压电发生元件以及使用压电发生元件产生电力的方法
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Application No.: US13280000Application Date: 2011-10-24
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Publication No.: US08562113B2Publication Date: 2013-10-22
- Inventor: Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
- Applicant: Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2010-093810 20100415
- Main IPC: H01L41/22
- IPC: H01L41/22 ; H01L41/00 ; H04R17/00 ; H02N2/00 ; B41J2/045
Abstract:
The present invention provides a piezoelectric thin film comprising an electrode film with a (001) orientation, a (NaxBi0.5)TiO0.5x+2.75—BaTiO3 film with a (001) orientation (x represents not less than 0.29 and not more than 0.4) and a (Na,Bi)TiO3—BaTiO3 piezoelectric layer, the electrode film, the (NaxBi0.5)TiO0.5x+2.75—BaTiO3 film, and the (Na,Bi)TiO3—BaTiO3 piezoelectric layer being laminated in this order.The lead-free piezoelectric thin film of the present invention has low dielectric loss and high piezoelectric performance.
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