发明授权
- 专利标题: Method for manufacturing light-emitting device
- 专利标题(中): 发光装置的制造方法
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申请号: US13548632申请日: 2012-07-13
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公开(公告)号: US08541251B2公开(公告)日: 2013-09-24
- 发明人: Naoki Uchiyama
- 申请人: Naoki Uchiyama
- 申请人地址: JP Hamamatsu-shi, Shizuoka
- 专利权人: Hamamatsu Photonics K.K.
- 当前专利权人: Hamamatsu Photonics K.K.
- 当前专利权人地址: JP Hamamatsu-shi, Shizuoka
- 代理机构: Drinker Biddle & Reath LLP
- 优先权: JPP2011-160027 20110721
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A light-emitting device manufacturing method comprises the steps of irradiating a substrate 2 having a III-V compound semiconductor layer 17 formed on a front face 2a with laser light L1 along lines to cut 5a, 5b, while locating a converging point P1 within the sapphire substrate 2 and using a rear face 2b thereof as a laser light entrance surface, and thereby forming modified regions 7a, 7b along the lines 5a, 5b within the substrate 2; then forming a light-reflecting layer on the rear face 2b of the substrate 2; and thereafter extending fractures generated from the modified regions 7a, 7b acting as a start point in the thickness direction of the substrate 2, and thereby cutting the substrate 2, the semiconductor layer 17 and the light-reflecting layer along the lines 5a, 5b, and manufacturing a light-emitting device.
公开/授权文献
- US20130023076A1 METHOD FOR MANUFACTURING LIGHT-EMITTING DEVICE 公开/授权日:2013-01-24
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