发明授权
US08529738B2 In situ plating and etching of materials covered with a surface film
失效
用表面膜覆盖的材料进行原位镀层和蚀刻
- 专利标题: In situ plating and etching of materials covered with a surface film
- 专利标题(中): 用表面膜覆盖的材料进行原位镀层和蚀刻
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申请号: US11767461申请日: 2007-06-22
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公开(公告)号: US08529738B2公开(公告)日: 2013-09-10
- 发明人: Robert J. Von Gutfeld , Alan C. West
- 申请人: Robert J. Von Gutfeld , Alan C. West
- 申请人地址: US NY New York
- 专利权人: The Trustees of Columbia University in the City of New York
- 当前专利权人: The Trustees of Columbia University in the City of New York
- 当前专利权人地址: US NY New York
- 代理机构: Baker Botts LLP
- 主分类号: C25D5/34
- IPC分类号: C25D5/34
摘要:
Systems and methods for plating and/or etching of hard-to-plate metals are provided. The systems and methods are designed to overcome the deleterious effect of superficial coating or oxide layers that interfere with the plating or etching of certain metal substrates. The systems and methods involve in situ removal of coating materials from the surfaces of the metal substrates while the substrates are either submerged in plating or etching solutions, or are positioned in a proximate enclosure just prior to submersion in the plating or etching solutions. Further, the substrates can be in contact with a suitable patterning mask to obtain patterned oxide-free regions for plating or etching. This in situ removal of coating layers may be achieved by pulse heating or photoablation of the substrate and the inhibiting coating layers. Electrical energy or laser light energy may be used for this purpose. Additionally or alternatively, the coating materials may be removed by mechanical means.
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