发明授权
- 专利标题: Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material
- 专利标题(中): 包括低阻尼谐振器材料的悬浮膜的横向声波谐振器
-
申请号: US12790303申请日: 2010-05-28
-
公开(公告)号: US08525619B1公开(公告)日: 2013-09-03
- 发明人: Roy H. Olsson , Ihab F. El-Kady , Maryam Ziaei-Moayyed , Darren W. Branch , Mehmet F. Su , Charles M. Reinke
- 申请人: Roy H. Olsson , Ihab F. El-Kady , Maryam Ziaei-Moayyed , Darren W. Branch , Mehmet F. Su , Charles M. Reinke
- 申请人地址: US NM Albuquerque
- 专利权人: Sandia Corporation
- 当前专利权人: Sandia Corporation
- 当前专利权人地址: US NM Albuquerque
- 代理商 Kevin W. Bieg
- 主分类号: H03H9/54
- IPC分类号: H03H9/54
摘要:
A very high-Q, low insertion loss resonator can be achieved by storing many overtone cycles of a lateral acoustic wave (i.e., Lamb wave) in a lithographically defined suspended membrane comprising a low damping resonator material, such as silicon carbide. The high-Q resonator can sets up a Fabry-Perot cavity in a low-damping resonator material using high-reflectivity acoustic end mirrors, which can comprise phononic crystals. The lateral overtone acoustic wave resonator can be electrically transduced by piezoelectric couplers. The resonator Q can be increased without increasing the impedance or insertion loss by storing many cycles or wavelengths in the high-Q resonator material, with much lower damping than the piezoelectric transducer material.
信息查询
IPC分类: