发明授权
US08525619B1 Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material 有权
包括低阻尼谐振器材料的悬浮膜的横向声波谐振器

Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material
摘要:
A very high-Q, low insertion loss resonator can be achieved by storing many overtone cycles of a lateral acoustic wave (i.e., Lamb wave) in a lithographically defined suspended membrane comprising a low damping resonator material, such as silicon carbide. The high-Q resonator can sets up a Fabry-Perot cavity in a low-damping resonator material using high-reflectivity acoustic end mirrors, which can comprise phononic crystals. The lateral overtone acoustic wave resonator can be electrically transduced by piezoelectric couplers. The resonator Q can be increased without increasing the impedance or insertion loss by storing many cycles or wavelengths in the high-Q resonator material, with much lower damping than the piezoelectric transducer material.
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