发明授权
US08497555B2 Vertical memory devices including indium and/or gallium channel doping
有权
垂直存储器件包括铟和/或镓通道掺杂
- 专利标题: Vertical memory devices including indium and/or gallium channel doping
- 专利标题(中): 垂直存储器件包括铟和/或镓通道掺杂
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申请号: US13298728申请日: 2011-11-17
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公开(公告)号: US08497555B2公开(公告)日: 2013-07-30
- 发明人: Jin-Gyun Kim , Ki-Hyun Hwang , Sung-Hae Lee , Ji-Hoon Choi
- 申请人: Jin-Gyun Kim , Ki-Hyun Hwang , Sung-Hae Lee , Ji-Hoon Choi
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec, P.A.
- 优先权: KR10-2010-0130396 20101220
- 主分类号: H01L29/792
- IPC分类号: H01L29/792 ; G11C11/40
摘要:
A vertical memory device may include a substrate, a first selection line on the substrate, a plurality of word lines on the first selection line, a second selection line on the plurality of word lines, and a semiconductor channel. The first selection line may be between the plurality of word lines and the substrate, and the plurality of word lines may be between the first and second selection lines. Moreover, the first and second selection lines and the plurality of word lines may be spaced apart in a direction perpendicular with respect to a surface of the substrate. The semiconductor channel may extend away from the surface of the substrate adjacent sidewalls of the first and second selection lines and the plurality of word lines. In addition, portions of the semiconductor channel adjacent the second selection line may be doped with indium and/or gallium. Related methods are also discussed.
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