Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a wafer

Invention Grant

US08494802B2 Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a wafer 有权

Title translation: 计算机实现的方法，计算机可读介质和用于确定晶片的一个或多个特性的系统

Patent Title: Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a wafer
Patent Title (中): 计算机实现的方法，计算机可读介质和用于确定晶片的一个或多个特性的系统
Application No.: US13000013

Application Date: 2009-06-19
Publication No.: US08494802B2

Publication Date: 2013-07-23
Inventor: Haiguang Chen , Daniel Kavaldjiev , Louis Vintro , George Kren
Applicant: Haiguang Chen , Daniel Kavaldjiev , Louis Vintro , George Kren
Applicant Address: US CA Milpitas
Assignee: KLA-Tencor Corp.
Current Assignee: KLA-Tencor Corp.
Current Assignee Address: US CA Milpitas
Agent Ann Marie Mewherter
International Application: PCT/US2009/047932 WO 20090619
International Announcement: WO2009/155502 WO 20091223
Main IPC: G06F19/00
IPC: G06F19/00

Abstract:

Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a wafer are provided.

Abstract(Chinese):

提供了计算机实现的方法，计算机可读介质和用于确定晶片的一个或多个特性的系统。

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