发明授权
- 专利标题： Method for producing a micromechanical component
- 专利标题（中）： 微机械部件的制造方法
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申请号： US13296923申请日： 2011-11-15
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公开(公告)号： US08492188B2公开(公告)日： 2013-07-23
- 发明人: Heiko Stahl , Christina Leinenbach , Axel Franke , Jochen Reinmuth , Ando Feyh , Christian Rettig
- 申请人： Heiko Stahl , Christina Leinenbach , Axel Franke , Jochen Reinmuth , Ando Feyh , Christian Rettig
- 申请人地址： DE Stuttgart
- 专利权人： Robert Bosch GmbH
- 当前专利权人： Robert Bosch GmbH
- 当前专利权人地址： DE Stuttgart
- 代理机构： Kenyon & Kenyon LLP
- 优先权： DE102010061782 20101123
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
A method for producing a micromechanical component is described. The method includes providing a substrate having a layer system including an insulating material situated on the substrate, a conductive layer section and a protective layer structure connected to the conductive layer section, which borders a section of the insulating material. The method furthermore includes carrying out an isotropic etching process for removing a part of the insulating material, the conductive layer section and the protective layer structure preventing the removal of the bordered section of the insulating material; and a structural element being developed, which includes the conductive layer section, the protective layer structure and the bordered section of the insulating material.
公开/授权文献
- US20120129291A1 METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT 公开/授权日：2012-05-24
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