Invention Grant
- Patent Title: Refractive index distribution measurement method and apparatus that measure transmission wavefronts of a test object immersed in different media having refractive index lower than that of the test object
- Patent Title (中): 折射率分布测量方法和装置，其测量浸没在折射率低于被测物体的不同介质的被测物体的透射波前
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Application No.: US12644714Application Date: 2009-12-22
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Publication No.: US08472013B2Publication Date: 2013-06-25
- Inventor: Seima Kato
- Applicant: Seima Kato
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2008-329274 20081225
- Main IPC: G01N21/41
- IPC: G01N21/41
Abstract:
A refractive index distribution measurement method includes the steps of measuring a first transmission wavefront of a test object by introducing reference light to the test object immersed in a first medium having a first refractive index lower than that of the test object by 0.01 or more, measuring a second transmission wavefront of the test object by introducing the reference light to the test object immersed in a second medium having a second refractive index lower than that of the test object by 0.01 or more and different from the first refractive index, and obtaining a refractive index distribution of the test object based on a measurement result of the first transmission wavefront and a measurement result of the second transmission wavefront.
Public/Granted literature
- US20100165355A1 REFRACTIVE INDEX DISTRIBUTION MEASUREMENT METHOD AND REFRACTIVE INDEX DISTRIBUTION MEASUREMENT APPARATUS Public/Granted day:2010-07-01
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